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专利名称：System and method for directing
electromagnetic beams
发明人：Blaine D. Johs申请号：US09/174885申请日：19981019公开号：US05929995A公开日：19990727
摘要：Disclosed is an electromagnetic beam directing system and method whichenables changing the direction of propagation of a spectroscopic beam ofelectromagnetic radiation while maintaining significant sensitivity of both (PSI) and(DELTA) ellipsometric parameters to changes in surfaces of monitored sample systems,while minimizing sensitivity to changes in electromagnetic beam directing meansorientation.
申请人：J.A. WOOLLAM CO. INC.
代理人：James D. Welch
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