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专利名称：MICROELECTROMECHANICAL
MICROPHONE
发明人：Alfons DEHE申请号：US15876239申请日：20180122
公开号：US20180213334A1公开日：20180726
专利附图：
摘要：A microelectromechanical microphone includes a planar first electrode that isformed, at least in portions, from an electrically conductive material, a planar secondelectrode that is formed, at least in portions, from an electrically conductive material and
that is arranged at a distance from the first electrode, a spacer that is arranged betweenthe first electrode and the second electrode, and a membrane that is arranged in a spacedefined between the first electrode and the second electrode and that is displaceable inthe direction of at least one of the first electrode or the second electrode. Themembrane has a membrane passage opening through which the spacer extends. Thespace defined between the first and the second electrode, in which the membrane isarranged, has a gas exchange connection with the surroundings of the microphone.
申请人：Infineon Technologies AG
地址：Neubiberg DE
国籍：DE
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